Keyence VR 5200 wide-area 3D measurement system and Taylor Hobson CCI HD Optical Profiler
Features
Keyence VR5200
- Wide area up to 200 mm x 100 mm stored in one 3D file.
- Maximum sample height of 75 mm.
- Maximum sample weight of 4.5 kg.
- 0.1 µm resolution (height).
- 0.4 µm repeatability (height).
Taylor Hobson CCI HD Optical Profiler
- Single scan range in the z-direction of 2.2 mm.
- Wide area up to 225 mm x 157 mm.
- Maximum sample height of 40 mm.
- Maximum sample weight of 10 kg.
- Measure film thickness down to 50 nm.
- 0.01 nm resolution over the entire measurement range.
- 0.02 nm repeatability.
Application:
- Geometrical measurements
- Roughness measurement
- 3D mapping of surface degradation
- 3D scan of components
- Wear of bearings
Working principle
Structured white light projects different interference fringe patterns onto the surface of the inspected object. The deformed fringe pattern corresponding with the object contour and the reflected light is captured by the camera. Based on the triangulation method, the 3D surface of the object can be reconstructed by the software.