Infrastructure
Deposition and processing tools
Our research group has a broad range of deposition and processing tools available for wafers, 3D porous and non-porous substrates and particles. Most of the equipment is designed and developed in-house for a maximal degree of flexibility, while allowing for in situ characterization.
Atomic layer deposition
- 10 ALD / PE-ALD reactors + 2 MLD reactors
- In situ / in vacuo characterization: SE, FTIR, MS, OES, XPS
- Glovebox / UHV sample transfer
- Mobile reactor for synchrotron
- Coating of wafers, 3D porous and non-porous, particles,…
Physical vapor deposition
- 4 magnetron sputter systems (DC & RF) + 1 thermal evaporator
- Combinatorial depositions
- Glovebox sample handling
- Coating of wafers and particles
Processing tools
- RTA for 150 mm wafers
- Plasma chamber for 150 mm wafers and 3D objects
- Tube furnaces
Characterization tools
Standard X-ray / optical / electrical characterization (ex situ)
- XRD/XRR/XRF: Bruker D8 diffractometers with Cu and Mo sources, mapping up to 300 mm wafers
- XPS: surface analysis mode, angle resolved mode and sputter depth profiling mode
- Spectroscopic ellipsometry, including mapping up to 150 mm wafers
- FTIR
-
IV/CV: automated sample mapping stage and cryogenic measurements on small samples
- 4-point probe setup to measure electronic sheet resistance
- Ellipsometric porosimetry
Electrochemical characterization
- Commercial potentiostat/galvanostat with impedance module
- 7 home-built potentiostats/galvanostats
In situ characterization during ALD/PE-ALD/MLD
- Spectroscopic ellipsometry
- Mass spectroscopy, Hiden HPR-30
- Optical emission spectroscopy
- FTIR
- XPS (in vacuo)
In situ characterization during thermal annealing
(up to 1000°C, ambient selection from air, He, N2, H2, O2, CO2,… and mixtures)
- XRD (including automated sample changer)
- Spectroscopic ellipsometry
- 4-point probe
- Laser light scattering
- Wafer curvature measurement
Gloveboxes
Ar filled gloveboxes with inert sample transfer in between each other:
- Deposition glovebox: connected to 2 ALD reactors and 1 PVD reactor
- Electrochemical glovebox: equipped with several galvanostat/potentiostats
- Surface analysis glovebox: connected to UHV line with ALD, XPS, SPM